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Materials Science at Oregon State University

Anodic oxides - from protective coatings to ceramic MEMS and surface nano-structuring

Date: Thursday, Apr 8th
Presenter: Peter Mardilovich, Hewlett-Packard, Corvallis, OR

Abstract


Brief history of electrochemical oxidation of metals - from 1861 to now
Types of anodic oxides:
Porous anodic oxides
Porosity control
Highly ordered porous anodic alumina
Unique nano-template
Surface micro-structuring
MEMS based on porous anodic alumina
Micro-heaters
Sensors
Vacuum integrated circuits
Dense anodic oxides:
Gate dielectrics (flexible TFT)
Conformal oxidation
Planarization
Multilayer films - nano-imprint mold
Surface nano-structuring
Final remarks